Three Decades of MEMS Inertial Sensors
ADI began exploring MEMS in the late 1980’s developing the iMEMS® process integrating sensors with active circuits. That processes culminated in our first product, the ADXL50, released in 1993 targeting automotive airbag deployment. Over the ensuing 30 years, ADI and others have deployed numerous MEMS processes and technologies for inertial sensing, pressure sensing, and optical actuation. As the technology matures, manufacturing commonalities and consolidation are leading to increasing scale, lower cost, and commoditization. ADI enters a 4th decade of inertial MEMS continuing to develop high performance accelerometers, gyroscopes, and IMUs.
